Power sources have become a critical enabling technology, especially for portable electronic devices. The goal is to have the smallest, lowest-cost power sources, which safely meet or exceed the mission lifetime. Our technology options include batteries and fuel cells. A critical component of these electrochemical devices is the ionic conducting electrolyte. Advances include electrolytes leading to dendrite-free lithium or silicon anodes for high energy density lithium batteries and low-cost, ambient temperature fuel cells. In addition, other microfabrication processing advances will be described such as the fabrication of ultra-low dielectric constant insulators and chemically amplified permanent dielectrics for integrated circuits and packages.